Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applications

Arreghini, AntonioAntonioArreghiniSuhane, AmitAmitSuhaneVan den Bosch, GeertGeertVan den BoschBreuil, LaurentLaurentBreuilDe Meyer, KristinKristinDe MeyerJurczak, GosiaGosiaJurczakVan Houdt, JanJanVan Houdt2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16670Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applicationsProceedings paper