Ryckaert, JulienJulienRyckaertGupta, AnshulAnshulGuptaJourdain, AnneAnneJourdainChava, BharaniBharaniChavaVan der Plas, GeertGeertVan der PlasVerkest, DiederikDiederikVerkestBeyne, EricEricBeyne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33917Extending the roadmap beyond 3nm through system scaling boosters: A case study on buried power rail and backside power deliveryProceedings paperhttps://ieeexplore.ieee.org/document/8731234