PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process

Loucif Seiad, MohamedMohamedLoucif SeiadGronheid, RoelRoelGronheidSingh, ArjunArjunSinghMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyCao, YiYiCaoFerhat, MarhounMarhounFerhat2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24169PMMA removal in diblock copolymer P(S-b-MMA) self-assembly processMeeting abstract