Cornagliotti, EmanueleEmanueleCornagliottiUruena De Castro, AngelAngelUruena De CastroHallam, BrettBrettHallamTous, LoicLoicTousRussell, RichardRichardRussellDuerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcik2021-10-222021-10-2220150927-0248https://imec-publications.be/handle/20.500.12860/25103Large area p-type PERL cells featuring local p+ BSF formed by laser processing of ALD Al2O3 layersJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927024815001014