Selective epitaxial deposition of Ge on Si: facet formation and how to avoid it

Wang, GangGangWangLeys, FrederikFrederikLeysLoo, RogerRogerLooCaymax, MattyMattyCaymaxBrunco, DavidDavidBruncoMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14771Selective epitaxial deposition of Ge on Si: facet formation and how to avoid itMeeting abstract