34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries

Raut, H. K.H. K.RautHasan, MahmudulMahmudulHasanDas, ArijitArijitDasPak, MuratMuratPak2025-08-292025-08-292024978-1-5106-8157-60277-786XWOS:001536747100037https://imec-publications.be/handle/20.500.12860/4613034 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask GeometriesProceedings paper10.1117/12.3034675978-1-5106-8158-3WOS:001536747100037