Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

Edinger, PierrePierreEdingerErrando-Herranz, CarlosCarlosErrando-HerranzTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariQuack, NielsNielsQuackVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.Gylfason2021-12-152021-11-022021-12-1520202160-9020WOS:000612090002011https://imec-publications.be/handle/20.500.12860/38160Compact low loss MEMS phase shifters for scalable field-programmable silicon photonicsProceedings paper978-1-943580-76-7WOS:000612090002011