Mc Geary, M. J.M. J.Mc GearyMertens, PaulPaulMertensVermeire, BertBertVermeireHeyns, MarcMarcHeynsSprey, HesselHesselSpreyLubbers, A.A.LubbersSchaekers, MarcMarcSchaekers2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2017Chlorine precursors for gate oxidation processesProceedings paper