The use of semi-empirical CMP model for the optimisation of the STI-module

Grillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisVrancken, EviEviVranckenHeylen, NancyNancyHeylenDevriendt, KatiaKatiaDevriendtFyen, WimWimFyenHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3473The use of semi-empirical CMP model for the optimisation of the STI-moduleProceedings paper