Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments

Franco, JacopoJacopoFrancoArimura, HiroakiHiroakiArimurade Marneffe, Jean-FrancoisJean-Francoisde MarneffeClaes, DieterDieterClaesBrus, StephanStephanBrusVandooren, AnneAnneVandoorenDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchiCroes, KristofKristofCroesKaczer, BenBenKaczer2023-06-012023-05-252023-06-0120222380-9248WOS:000968800700043https://imec-publications.be/handle/20.500.12860/41620Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatmentsProceedings paper10.1109/IEDM45625.2022.10019385978-1-6654-8959-1WOS:000968800700043