Nyns, LauraLauraNynsLisoni, JuditJuditLisoniVan den Bosch, GeertGeertVan den BoschVan Elshocht, SvenSvenVan ElshochtVan Houdt, JanJanVan Houdt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22873Atomic layer deposition of scandium-based oxidesOral presentation