Alignment and averaging of scanning electron microscope image contours for optical proximity correction modeling purposes

De Bisschop, PeterPeterDe BisschopVan de Kerkhove, JeroenJeroenVan de Kerkhove2021-10-182021-10-1820101537-1646https://imec-publications.be/handle/20.500.12860/16935Alignment and averaging of scanning electron microscope image contours for optical proximity correction modeling purposesJournal article