On the nature of grown-in defects in silicon: dependence on pulling conditions and evolution during treatments

Vanhellemont, JanJanVanhellemontKissinger, G.G.KissingerSenkader, S.S.SenkaderGräf, D.D.GräfKenis, KarineKarineKenisDepas, MichelMichelDepasLambert, U.U.LambertWagner, PatrickPatrickWagner2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1615On the nature of grown-in defects in silicon: dependence on pulling conditions and evolution during treatmentsProceedings paper