Chemical profiling with photoemission: a comparison between angle-resolved XPS and high-energy photoemission on full gate stacks

Conard, ThierryThierryConardSchram, TomTomSchramAdelmann, ChristophChristophAdelmannWoicik, J.J.Woicik2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18723Chemical profiling with photoemission: a comparison between angle-resolved XPS and high-energy photoemission on full gate stacksMeeting abstract