Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV

von Laffert, ValentinValentinvon LaffertSajjadian, FaeghehFaeghehSajjadianRichter, RobertRobertRichtervan Setten, MichielMichielvan SettenHolzmeier, FabianFabianHolzmeier2024-04-022024-04-022024-04-010021-9606https://imec-publications.be/handle/20.500.12860/43763Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eVJournal article10.1063/5.0203648WOS:001194724900012Physical chemistryEUV lithographyphotoacid generatorphotoionizationsynchrotronphotoelectron photoion coincidence