Deep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides

Van Erps, JürgenJürgenVan ErpsVan Steenberge, GeertGeertVan SteenbergeHendrickx, NinaNinaHendrickxGeerinck, PeterPeterGeerinckVolckaerts, BartBartVolckaertsDebaes, ChristopheChristopheDebaesVan Daele, PeterPeterVan DaeleThienpont, HugoHugoThienpont2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11393Deep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguidesProceedings paper