Duval, FabriceFabriceDuvalSoussan, PhilippePhilippeSoussanMiller, AndyAndyMillerDe Raedt, WalterWalterDe RaedtSun, XiaoXiaoSunBeyne, EricEricBeyneOkoro, ChukwudiChukwudiOkoro2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17050Evaluation of photosensitive spin-on-dielectrics for 3-D wafer level packagingOral presentation