Si1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing

Morris, RichardRichardMorrisHase, ThomasThomasHaseSanchez, AnaAnaSanchezRowlands, GeorgeGeorgeRowlands2021-10-232021-10-2320161044-0305https://imec-publications.be/handle/20.500.12860/27043Si1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencingJournal articlehttp://rd.springer.com/article/10.1007%2Fs13361-016-1439-4