Eneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerWang, GangGangWangMitard, JeromeJeromeMitardHellings, GeertGeertHellingsBrunco, DavidDavidBruncoSimoen, EddyEddySimoenLoo, RogerRogerLooCaymax, MattyMattyCaymaxClaeys, CorCorClaeysDe Meyer, KristinKristinDe MeyerMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-182021-10-1820100040-6090https://imec-publications.be/handle/20.500.12860/17075Short-channel epitaxial germanium pMOS transistorsJournal article