Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry

Nair, Vineet VijayakrishnanVineet VijayakrishnanNairVan Look, LieveLieveVan LookAubert, RemkoRemkoAubertHendrickx, EricEricHendrickx2022-01-052021-11-022022-01-0520200277-786XWOS:000632585900007https://imec-publications.be/handle/20.500.12860/38076Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometryProceedings paper10.1117/12.2572993978-1-5106-3843-3WOS:000632585900007