Atomic layers deposited nano-mechanical resonators for silicon photonics

Rajendran, KhannanKhannanRajendranPetit, R.R.PetitDetavernier, C.C.DetavernierVan Thourhout, DriesDriesVan Thourhout2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37091Atomic layers deposited nano-mechanical resonators for silicon photonicsOral presentationhttps://www.photonics.intec.ugent.be/publications/publications.asp?ID=4670