Plasma Charging Damage in HK-First and HK-Last RMG NMOS Devices

Hiblot, GaspardGaspardHiblotParihar, NarendraNarendraPariharDupuy, EmmanuelEmmanuelDupuyMannaert, GeertGeertMannaertBaudot, SylvainSylvainBaudotKaczer, BenBenKaczerFranco, JacopoJacopoFrancoVandooren, AnneAnneVandoorenDe Heyn, VincentVincentDe HeynMercha, AbdelkarimAbdelkarimMercha2022-02-222022-02-2220211530-4388WOS:000659548400005https://imec-publications.be/handle/20.500.12860/39025Plasma Charging Damage in HK-First and HK-Last RMG NMOS DevicesJournal article10.1109/TDMR.2021.3073473WOS:000659548400005HIGH-K/METAL-GATELEAKAGE CURRENTMODEL