O'Connor, RobertRobertO'ConnorHughes, GregGregHughesDegraeve, RobinRobinDegraeveKaczer, BenBenKaczer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9355Temperature-accelerated breakdown in ultra-thin SiON dielectricsJournal article