Status update on a new class of solution processable low-k dielectric coating for use as ILD with k <2.4

Pakbaz, HashHashPakbazHacker, NNHackerTokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25723Status update on a new class of solution processable low-k dielectric coating for use as ILD with k <2.4Meeting abstracthttp://www2.avs.org/symposium2015/Papers/Paper_EM-ThM5.html