O'Sullivan, BarryBarryO'SullivanKaushik, VidyaVidyaKaushikEveraert, Jean-LucJean-LucEveraertTrojman, LionelLionelTrojmanRagnarsson, Lars-AkeLars-AkeRagnarssonPantisano, LuigiLuigiPantisanoRohr, ErikaErikaRohrDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12658Effectiveness of nitridation of hafnium silicate dielectrics: a comparison between thermal and plasma nitridationJournal article