Horvath, Z.Z.HorvathMolnart, G.G.MolnartPeto, G.G.PetoDeszi, I.I.DesziLoo, RogerRogerLooCaymax, MattyMattyCaymaxZ'd'ansky, K.K.Z'd'ansky2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7662Epitaxial erbium silicide contact to silicon-germaniumOral presentation