EPE analysis of sub-N10 BEOL structures with Coventor's SEMulator3D

Franke, Joern-HolgerJoern-HolgerFrankeMurdoch, GayleGayleMurdochHalder, SandipSandipHalder2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28352EPE analysis of sub-N10 BEOL structures with Coventor's SEMulator3DMeeting abstracthttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2258195