Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platform

Al-Moghazy, MohamedMohamedAl-MoghazyRottenberg, XavierXavierRottenbergErismis, Mehmet AkifMehmet AkifErismisEl-Gamal, HassanHassanEl-GamalTilmans, HarrieHarrieTilmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20281Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platformProceedings paper