Advantages of high vacuum for electrical scanning probe microscopy

Ludwig, JonathanJonathanLudwigMascaro, MarcoMarcoMascaroCelano, UmbertoUmbertoCelanoVandervorst, WilfriedWilfriedVandervorstParedis, KristofKristofParedis2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33482Advantages of high vacuum for electrical scanning probe microscopyJournal articlehttps://compoundsemiconductor.net/article/107568/Advantages_of_High_Vacuum_for_Electrical_Scanning_Probe_Microscopy