Gawlik, AndrzejAndrzejGawlikBogdanowicz, JanuszJanuszBogdanowiczSchulze, AndreasAndreasSchulzeMisiewicz, JanJanMisiewiczVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33018Photonic properties of periodic arrays of nanoscale Si finsProceedings paperhttps://doi.org/10.1117/12.2510070