Contribution of fast and slow states to negative bias temperature instabilities in Hf(x)Si(1-x)ON/TaN based pMOSFETs

Aoulaiche, MarcMarcAoulaicheHoussa, MichelMichelHoussaDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10019Contribution of fast and slow states to negative bias temperature instabilities in Hf(x)Si(1-x)ON/TaN based pMOSFETsJournal article