Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results

De Wolf, IngridIngridDe WolfMaes, HermanHermanMaesMoffet, J.J.MoffetIgnat, M.M.Ignat2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/598Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical resultsProceedings paper