Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration

Hiro, AkitoAkitoHiroLeech, DamienDamienLeechSchoofs, GeertGeertSchoofsSlabbekoorn, JohnJohnSlabbekoornPhommahaxay, AlainAlainPhommahaxayKennes, KoenKoenKennesBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2025-06-302025-06-212025-06-302024979-8-3315-1651-22164-0157WOS:001460256800032https://imec-publications.be/handle/20.500.12860/45820Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous IntegrationProceedings paper10.1109/3DIC63395.2024.10830250979-8-3315-1650-5WOS:001460256800032