Claes, GertGertClaesSeveri, SimoneSimoneSeveriCelis, Jean-PierreJean-PierreCelisWitvrouw, AnnAnnWitvrouw2021-10-182021-10-1820100960-1317https://imec-publications.be/handle/20.500.12860/16877Improvement of the poly-SiGe electrode contact technology for MEMSJournal article