Fabrication of a CMOS-based imaging chip with monolithically integrated RGB and NIR filters

Vereecke, BartBartVereeckeVan Besien, ElsElsVan BesienSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSpooren, NickNickSpoorenTack, KlaasKlaasTackLambrechts, AndyAndyLambrechts2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32182Fabrication of a CMOS-based imaging chip with monolithically integrated RGB and NIR filtersProceedings paperhttps://doi.org/10.3390/proceedings2130751