Stoffels, SteveSteveStoffelsSeveri, SimoneSimoneSeveriVan Hoof, RitaRitaVan HoofMertens, RobertRobertMertensPuers, BobBobPuersWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18045Light sensitive SiGe MEM resonator for detection and frequency tuning applicationsProceedings paper