Birmpiliotis, DimitriosDimitriosBirmpiliotisCzarnecki, PiotrPiotrCzarneckiKoutsoureli, MatroniMatroniKoutsoureliPapaioannou, GeorgeGeorgePapaioannouDe Wolf, IngridIngridDe Wolf2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/26346Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide filmJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716302003