Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and Beyond

Pak, MuratMuratPakZanders, WesleyWesleyZandersWong, PatrickPatrickWongHalder, SandipSandipHalderBlanc, RomualdRomualdBlancSouriau, LaurentLaurentSouriauLee, JeonghoonJeonghoonLeeKar, Gouri SankarGouri SankarKar2022-12-152022-09-192022-12-152022978-1-5106-4977-40277-786XWOS:000850450900017https://imec-publications.be/handle/20.500.12860/40458Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and BeyondProceedings paper10.1117/12.2618761978-1-5106-4978-1WOS:000850450900017