High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers

Loo, RogerRogerLooWang, GangGangWangMitard, JeromeJeromeMitardDe Jaeger, BriceBriceDe JaegerTakeuchi, ShotaroShotaroTakeuchiEneman, GeertGeertEnemanLin, VicVicLinWang, Wei-EWei-EWangMeuris, MarcMarcMeurisCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-182021-10-182009-09https://imec-publications.be/handle/20.500.12860/15742High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafersProceedings paper