Gronheid, RoelRoelGronheidDoise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanRincon Delgadillo, PaulinaPaulinaRincon DelgadilloKarageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertVandenberghe, GeertGeertVandenbergheSayan, SafakSafakSayanLin, GuanyangGuanyangLin2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25341Implementation of DSA for electrical test vehicles at the 7 nm nodeProceedings paper