Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21454Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustnessProceedings paper