Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUV

Melvin III, LawrenceLawrenceMelvin IIIJonckheere, RikRikJonckheereHendrickx, EricEricHendrickx2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36967Two-dimensional feature stochastic printing with mask deficiencies in high-NA EUVOral presentation10.1117/12.2584775https://doi.org/10.1117/12.2584775