Conard, ThierryThierryConardKenens, ConnyConnyKenensDe Gendt, StefanStefanDe GendtClaes, MartineMartineClaesLagrange, SébastienSébastienLagrangeWorthA, W.W.WorthAJassal, S.S.JassalVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4218TOFSIMS evaluation of the removal of resists on silicon by ozone-based cleaningProceedings paper