Thermal recovery from stress-induced high-k dielectric film degradation

O'Sullivan, BarryBarryO'SullivanPantisano, LuigiLuigiPantisanoRoussel, PhilippePhilippeRousselDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162007-02https://imec-publications.be/handle/20.500.12860/12660Thermal recovery from stress-induced high-k dielectric film degradationJournal article