Driesen, MaartenMaartenDriesenCeyssens, FrederikFrederikCeyssensDe Coster, JeroenJeroenDe CosterPuers, RobertRobertPuers2021-10-172021-10-172008-09https://imec-publications.be/handle/20.500.12860/13673Nickel-plated thermal actuator with electrostatic latchProceedings paper