Chang, XinyueXinyueChangVermeersch, BjornBjornVermeerschOprins, HermanHermanOprinsLofrano, MelinaMelinaLofranoCherman, VladimirVladimirChermanPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiDe Wolf, IngridIngridDe Wolf2025-09-032025-09-032025-AUG2156-3950WOS:001556236600002https://imec-publications.be/handle/20.500.12860/46145Thermal Modeling and Analysis of Equivalent Thermal Properties for Advanced BEOL StacksJournal article10.1109/tcpmt.2025.356483310.1109/TCPMT.2025.3564833WOS:001556236600002CONDUCTIVITY