Integrated silicon-on-insulator spectrometer with single pixel readout for mid-infrared spectroscopy

Vasiliev, AntonAntonVasilievMuneeb, MuhammadMuhammadMuneebAllaert, JeroenJeroenAllaertVan Campenhout, JorisJorisVan CampenhoutBaets, RoelRoelBaetsRoelkens, GuntherGuntherRoelkens2021-10-262021-10-262018-111077-260Xhttps://imec-publications.be/handle/20.500.12860/32162Integrated silicon-on-insulator spectrometer with single pixel readout for mid-infrared spectroscopyJournal articlehttps://ieeexplore.ieee.org/document/8327490/