Advanced RBS analysis of thin films in micro-electronics

Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuHuyghebaert, CedricCedricHuyghebaertNauwelaerts, SophieSophieNauwelaertsNakajima, K.K.NakajimaKimura, K.K.KimuraVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5097Advanced RBS analysis of thin films in micro-electronicsProceedings paper