Woelk, EgbertEgbertWoelkLoo, RogerRogerLoo2021-10-222021-10-222014-120038-111Xhttps://imec-publications.be/handle/20.500.12860/24826Delivering new liquid metalorganic precursors into silicon Epi and CVDJournal articlehttp://electroiq.com/wp-content/uploads/magazines/sst_nov-dec_de.pdf