Impact of process variability on BEOL TDDB lifetime model assessment

Croes, KristofKristofCroesKocaay, DenizDenizKocaayCiofi, IvanIvanCiofiBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25112Impact of process variability on BEOL TDDB lifetime model assessmentProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112777